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Nanotwinned Metal MEMS Films With Unprecedented Strength ...Dimensional Stability Is Particularly Important In Capacitive-based Sensors And Guidance MEMS Devices, Where Dimensional Changes Causedbymicrostructural Evoluti On Orthermalexpansion Must Be Sig-nificantly Less Than The Expected Changes Induced During Detection/ Operation Of The Device. Therefore, Thermal And Mechanical Stability Is Fig.2. 11th, 2024


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